VIA Hardware has posted a comparison of all available VIA chipsets, and their die sizes and manufacturing processes.

The Pro266, with its associated DDR circuitry, is marginally bigger then the Pro133A. It is currently being produced on the same .22 Micron process, which should give way to .18 as time goes on. The die is still a manageable 91mm^2. This is roughly equivalent to AMD´s Duron processor.

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